Low-K Dielectric Breakdown Voltage at Charles Grose blog

Low-K Dielectric Breakdown Voltage. Dielectric breakdown is a sudden and catastrophic increase in the conductivity of an insulator caused by electrical stress. We show that interconnect geometric variability. The dielectric constant, leakage properties, and breakdown voltage of the dielectrics were measured on blanket films. A test structure based on mis planar capacitors, designed to investigate intrinsic electrical properties, has been used.

[PDF] Plasma Damage on Lowk Dielectric Materials Semantic Scholar
from www.semanticscholar.org

We show that interconnect geometric variability. Dielectric breakdown is a sudden and catastrophic increase in the conductivity of an insulator caused by electrical stress. A test structure based on mis planar capacitors, designed to investigate intrinsic electrical properties, has been used. The dielectric constant, leakage properties, and breakdown voltage of the dielectrics were measured on blanket films.

[PDF] Plasma Damage on Lowk Dielectric Materials Semantic Scholar

Low-K Dielectric Breakdown Voltage A test structure based on mis planar capacitors, designed to investigate intrinsic electrical properties, has been used. The dielectric constant, leakage properties, and breakdown voltage of the dielectrics were measured on blanket films. A test structure based on mis planar capacitors, designed to investigate intrinsic electrical properties, has been used. We show that interconnect geometric variability. Dielectric breakdown is a sudden and catastrophic increase in the conductivity of an insulator caused by electrical stress.

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